Hostname: page-component-78c5997874-94fs2 Total loading time: 0 Render date: 2024-11-03T00:23:22.535Z Has data issue: false hasContentIssue false
  • English
  • Français

Resolution and Contrast in Dual Beam Imaging of Three Dimensional Structures of Microelectronic Devices

Published online by Cambridge University Press:  05 August 2007

J Evertsen  and
E Lifshin
J Evertsen
Affiliation:
University at Albany
E Lifshin
Affiliation:
University at Albany
Get access

Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 178 - 179
Copyright
© 2007 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)