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Quantitative X-ray analysis in the variable pressure SEM: The Effect of Gas Composition, Pressure, and Detector Geometry

Published online by Cambridge University Press:  03 August 2008

SJ Bean  and
VM Kugler
SJ Bean
Affiliation:
Carl Zeiss SMT Ltd, United Kingdom
VM Kugler
Affiliation:
Carl Zeiss SMT Ltd, United Kingdom
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 1282 - 1283
Copyright
© 2008 Microscopy Society of America

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