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Quantitative Analysis of Metal Nanoparticles

Published online by Cambridge University Press:  02 July 2020

Charles E. Lyman*
Affiliation:
Department of Materials Science and Engineering, Lehigh University, 5 East Packer Avenue, Bethlehem, PA18015
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Extract

Analysis of nanosize particles by x-ray emission spectrometry in the analytical electon microscope (AEM) is limited by the level of electron current that can be placed in a 1-2 nm excitation beam and by the consequent electron beam damage. The current in the beam limits the number of x-ray counts generated in the particle, while the beam damage may cause changes in particle chemistry, structure, orientation, and location. The objective of “ultimate AEM analysis” is to make useful measurements right up to the limit where beam damage prohibits analysis.

Elemental analysis of sub-10nm metal particles supported on a ceramic support requires a field-emission source operating at 100-300 kV to generate a significant number of x-ray counts from the area under the beam in a reasonable time [1]. The high current density in the beam of such an instrument can cause damage to the particle or to the underlying support material.

Type
Microscopy and Microanalysis: “Showstoppers” in Critical Applications Areas
Copyright
Copyright © Microscopy Society of America 1997

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References

[1]Lyman, C.E.et al., J. Microsc. 176, 1994, 8598.10.1111/j.1365-2818.1994.tb03503.xCrossRefGoogle Scholar
[2]Lakis, R.E., Lyman, C.E., and Stenger, H.G., J. Catal. 154, 1995, 261275.10.1006/jcat.1995.1168CrossRefGoogle Scholar
[3]Lyman, C.E.et al., Proc. 2nd Mexican Cong, of Electron Microscopy, 1994, SSM16.Google Scholar
[4] This work is from the PhD dissertation of Lakis, R.E. which was supported by the Department of Energy under grant DE-FGO2-86ER45269.Google Scholar