Hostname: page-component-cd9895bd7-hc48f Total loading time: 0 Render date: 2024-12-23T01:07:40.741Z Has data issue: false hasContentIssue false

A Practical Solution for Eliminating Artificial Image Contrast in Aberration-Corrected TEM

Published online by Cambridge University Press:  04 January 2008

Jun Yamasaki
Affiliation:
EcoTopia Science Institute, Nagoya University, Nagoya 464-8603, Japan
Tomoyuki Kawai
Affiliation:
Department of Crystalline Materials Science, Nagoya University, Nagoya 464-8603, Japan
Yushi Kondo
Affiliation:
Department of Crystalline Materials Science, Nagoya University, Nagoya 464-8603, Japan
Nobuo Tanaka
Affiliation:
EcoTopia Science Institute, Nagoya University, Nagoya 464-8603, Japan
Get access

Abstract

We propose a simple and practical solution to remove artificial contrast inhibiting direct interpretation of atomic arrangements in aberration-corrected TEM. The method is based on a combination of “image subtraction” for elimination of nonlinear components in images and newly improved “image deconvolution” for proper compensation of nonflat phase contrast transfer function. The efficiency of the method is shown by experimental and simulation data of typical materials such as gold, silicon, and magnesium oxide. The hypothetical results from further improvements of TEM instruments are also simulated. It is concluded that we can approach actual atomic structures by using the present method, that is, a proper combination of a Cs corrector, image subtraction, and image deconvolution processes.

Type
Research Article
Copyright
© 2008 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Akashi, T., Sugawara, A., Kasai, H., Yoshida, T., Matsuda, T., Togawa, Y., Harada, K. & Tonomura, A. (2005). Confirmation of information transfer using lattice images. Appl Phys Lett 87, 174101.Google Scholar
Allen, L.J., Mcbride, W., O'leary, N.L. & Oxley, M.P. (2004). Phase retrieval from images in the presence of first-order vortices. Ultramicroscopy 100, 91104.Google Scholar
Coene, W.M.J., Thust, A., Op De Beek, M. & Van Dyck, D. (1996). Maximum-likelihood method for focus-variation image reconstruction in high resolution electron microscopy. Ultramicroscopy 64, 109135.Google Scholar
Haider, M. & Muller, H. (2005). Is there a road map of aberration correction towards ultra-high resolution in TEM and STEM? Proceedings of the Microscopy and Microanalyis Meeting 2005, CD 546.
Haider, M., Rose, H., Uhlemann, S., Kabius, B. & Urban, K. (1998). Toward 0.1 nm resolution with the first spherically-corrected transmission electron microscope. J Electron Microsc 47, 395405.Google Scholar
Han, F.S., Fan, H.F. & Li, F.H. (1986). Image-processing in high-resolution electron-microscopy using the direct method. (II) Image deconvolution. Acta Cryst A 42, 353356.Google Scholar
Hirahara, K., Saitoh, K., Yamasaki, J. & Tanaka, N. (2006). Direct observation of six-membered rings in the upper and lower walls of a single wall carbon nanotube by spherical aberration-corrected HRTEM. Nano Lett 6, 17781783.Google Scholar
Hohenstein, M. (1991). Reconstruction of the exit surface wave function from experimental HRTEM micrographs. Ultramicroscopy 35, 119129.Google Scholar
Hu, J.J. & Tanaka, N. (1999). A study of the validity of the image deconvolution method on the basis of channeling theory for thicker crystals. Ultramicroscopy 80, 15.Google Scholar
Kawasaki, T., Takai, Y., Ikuta, T. & Shimizu, R. (2001). Wave field restoration using three-dimensional Fourier filtering method. Ultramicroscopy 90, 4759.Google Scholar
Lentzen, M. & Urban, K. (2006). Contrast transfer and resolution limits for sub-Angstrom high-resolution transmission electron microscopy. Proceedings of the Microscopy and Microanalyis Meeting 12, CD1456.
Meyer, R.R., Kirkland, A.I. & Saxton, W.O. (2002). A new method for the determination of the wave aberration function for high resolution TEM (I). Ultramicroscopy 92, 89109.Google Scholar
Mook, H.W. & Kruit, P. (1999). On the monochromatisation of high brightness electron sources for electron microscopy. Ultramicroscopy 78, 43.Google Scholar
Rose, H. (1990). Outline of a spherically corrected semiaplanatic medium-voltage transmission electron-microscope. Optik 85, 19.Google Scholar
Saxton, W.O. (1980). Correction of artefacts in linear and nonlinear high resolution electron micrographs. J Microsc Spectrosc Electron 5, 661670.Google Scholar
Spence, J.C.H. (1981). Experimental HREM. Oxford: Clarendon Press, p. 126.
Tanaka, N., Yamasaki, J., Fuchi, S. & Takeda, Y. (2003a). First Observation of InGaAs quantum dots in GaP by spherical aberration-corrected HRTEM in comparison with ADF-STEM and conventional HRTEM. Microsc Microanal 10, 139145.Google Scholar
Tanaka, N., Yamasaki, J., Kawai, T. & Pan, H.Y. (2004). The first observation of carbon nanotubes by spherical aberration-corrected high-resolution transmission electron microscopy. Nanotechnology 15, 17791784.Google Scholar
Tanaka, N., Yamasaki, J., Usuda, K. & Ikarashi, N. (2003b). First observation of SiO2/Si(100) interfaces by spherical aberration-corrected high-resolution transmission electron microscopy. J Electron Microsc 52, 6973.Google Scholar
Tang, C.Y., Chen, J.H., Zandbergen, H.W. & Li, F.H. (2006). Image deconvolution in spherical aberration-corrected high-resolution transmission electron microscopy. Ultramicroscopy 106, 539546.Google Scholar
Yamasaki, J., Kawai, T. & Tanaka, N. (2004). Direct observation of a stacking fault in Si1−xGex semiconductors by spherical aberration-corrected TEM and conventional ADF-STEM. J Electron Microsc 53, 129135.Google Scholar
Yamasaki, J., Kawai, T. & Tanaka, N. (2005). A simple method for minimizing non-linear image contrast in spherical aberration-corrected HRTEM. J Electron Microsc 54, 209214.Google Scholar