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Overview: Recent Progress in Three-Dimensional Atom Probe Instruments and Applications

Published online by Cambridge University Press:  14 November 2007

Alfred Cerezo ,
Peter H. Clifton ,
Sergio Lozano-Perez ,
Peter Panayi ,
Gang Sha  and
George D.W. Smith
Alfred Cerezo
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK
Peter H. Clifton
Affiliation:
Oxford nanoScience Division, Imago Scientific Instruments, 4-6 Carters Lane, Kiln Farm, Milton Keynes MK11 3ER, UK
Sergio Lozano-Perez
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK
Peter Panayi
Affiliation:
Oxford nanoScience Division, Imago Scientific Instruments, 4-6 Carters Lane, Kiln Farm, Milton Keynes MK11 3ER, UK
Gang Sha
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK
George D.W. Smith
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK
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Abstract

Over the last few years there have been significant developments in the field of three-dimensional atom probe (3DAP) analysis. This article reviews some of the technical compromises that have led to different instrument designs and the recent improvements in performance. An instrument has now been developed, based around a novel reflectron configuration combining both energy compensation and focusing elements, that yields a large field of view and very high mass resolution. The use of laser pulsing in the 3DAP, together with developments in specimen preparation methods using a focused ion-beam instrument, have led to a significant widening in the range of materials science problems that can be addressed with the 3DAP. Recent studies of semiconductor materials and devices are described.

Keywords

atom probetomographysemiconductorslaser pulsingspecimen preparationgrain boundarysteels
Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue 6: Special Issue: Atom Probe Tomography , December 2007 , pp. 408 - 417
Copyright
© 2007 Microscopy Society of America

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References

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Cerezo et al

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Cerezo et al

Figure 4(b). Fe superalloy, isosurface from the same material as Fig 4(b), although it is actually a different set. All Mg and Zn atoms are shown.

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