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Observation of Point Defect in Silicon using HRTEM

Published online by Cambridge University Press:  01 August 2004

Sung Il Baik
Affiliation:
Seoul National University
Hee-Suk Chung
Affiliation:
Seoul National University
Jian-Min Zuo
Affiliation:
University of Illinois
Young-Woon Kim
Affiliation:
Seoul National University
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Copyright
© 2004 Microscopy Society of America

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