Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-11-26T19:08:11.757Z Has data issue: false hasContentIssue false
  • English
  • Français

Is Microanalysis Possible in the Helium Ion Microscope?

Published online by Cambridge University Press:  08 July 2011

David C. Joy  and
Brendan J. Griffin
David C. Joy*
Affiliation:
Electron Microscopy Facility, University of Tennessee, Knoxville, TN 37996-0840, USA Center for NanoPhase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6496, USA
Brendan J. Griffin
Affiliation:
Center for NanoPhase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6496, USA Centre for Microscopy, Characterization and Analysis (M010), University of Western Australia, Crawley, WA 6009, Australia
*
Corresponding author. E-mail: [email protected]
Get access

Abstract

Because the ability to perform some form of chemical microanalysis has become an essential feature for any microscope, it is necessary to investigate what options are available in the new “ORION” helium ion microscope (HIM). The HIM has the ability to visualize local variations in specimen chemistry in both the ion induced secondary electron and the Rutherford backscattered imaging modes, but this provides only limited and qualitative information. Quantitative, elementally specific, microanalysis could be performed in the HIM using secondary electron spectroscopy, Rutherford backscattered ion spectroscopy, or secondary ion mass spectroscopy, but while each of these options has promise, none of them can presently guarantee either reliable element identification or quantitative analysis across the periodic table.

Keywords

microanalysision beamssecondary electronsRutherford backscatterSIMS
Type
Helium Ion Microscopy
Information
Microscopy and Microanalysis , Volume 17 , Issue 4 , August 2011 , pp. 643 - 649
Copyright
Copyright © Microscopy Society of America 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Funsten, H.O., Ritzau, S.M., Harper, R.W. & Korle, R. (2003). Fundamental limits to the detection of low-energy ions using silicon solid state detectors. Appl Phys Lett 84(18), 3552–3554.CrossRefGoogle Scholar
Gatti, E. & Rehak, P. (1984). Semiconductor drift chamber—An application of a novel charge transport scheme. Nucl Instrum Meth A 225, 608–614.CrossRefGoogle Scholar
Goldstein, J.I., Newbury, D.E., Joy, D.C., Lyman, C., Echlin, P.E., Lifshin, E., Sawyer, L. & Michael, J. (2003). Scanning Electron Microscopy and X-Ray Microanalysis, 3rd ed.New York: Kluewer Academic/Plenum Press.CrossRefGoogle Scholar
Johansson, S.A.E. & Johansson, T.B. (1976). Proton induced X-ray spectroscopy. Nucl Instrum Methods 137, 473–512.CrossRefGoogle Scholar
Joy, D.C. (1985). The EDS detector—A quantitative model. Rev Sci Instrum 56, 1772–1779.CrossRefGoogle Scholar
Joy, D.C., Meyer, H.M., Bolorizadeh, M., Lin, Y. & Newbury, D.E. (2007). On the production of X-rays by low energy ion beams. Scanning 29, 1–5.CrossRefGoogle ScholarPubMed
Levi-Setti, R. (1983). An ion microscope. In Proc. Scanning Electron Microscopy 1974, Johari, O. (Ed.), vol. 1, pp. 125–130. Chicago, IL: IITRI. See also Levi-Setti, R. (1983). Ion channeling effects in scanning ion microscopy. Scan Electron Microsc 1, 1–8.Google Scholar
Lin, Y. & Joy, D.C. (2005). A new examination of secondary electron yield data. Surf Interf Anal 37, 895–900.CrossRefGoogle Scholar
Mayer, M. (2006). SIMNRA Users Guide. Technical Report IPP 9/113. Garching, Germany: Max-Planck-Institut für Plasmaphysik.Google Scholar
Ramachandra, R., Griffin, B.J. & Joy, D.C. (2009). A model of secondary electron imaging in the helium ion scanning microscope. Ultramicroscopy 109, 748–757.Google Scholar
Suzuki, Y. (2008). A comparison of electron and ion induced secondary electron spectra. Microsc Today 16, 6–10.CrossRefGoogle Scholar
Tesmer, J.R. & Nastasi, M. (1995). Handbook of Modern Ion Beam Materials Analysis. Boston, MA: Materials Research Society.Google Scholar
Thompson, J.J. (1912). Ionization by moving particles. Phil Mag 28, 449–457.CrossRefGoogle Scholar
Ward, B.M., Notte, J. & Economou, N.P. (2006). Helium ion microscopy. J Vac Sci Technol B 24, 2871–2874.Google Scholar