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Information Transfer in a TEM Corrected for Spherical and Chromatic Aberration

Published online by Cambridge University Press:  02 July 2010

M. Haider ,
P. Hartel ,
H. Müller ,
S. Uhlemann  and
J. Zach
M. Haider*
Affiliation:
Corrected Electron Optical Systems GmbH, Heidelberg, Germany
P. Hartel
Affiliation:
Corrected Electron Optical Systems GmbH, Heidelberg, Germany
H. Müller
Affiliation:
Corrected Electron Optical Systems GmbH, Heidelberg, Germany
S. Uhlemann
Affiliation:
Corrected Electron Optical Systems GmbH, Heidelberg, Germany
J. Zach
Affiliation:
Corrected Electron Optical Systems GmbH, Heidelberg, Germany
*
Corresponding author. E-mail: [email protected]
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Abstract

For the transmission electron aberration-corrected microscope (TEAM) initiative of five U.S. Department of Energy laboratories in the United States, a correction system for the simultaneous compensation of the primary axial aberrations, the spherical aberration Cs, and the chromatic aberration Cc has been developed and successfully installed. The performance of the resulting Cc /Cs-corrected TEAM instrument has been investigated thoroughly. A significant improvement of the linear contrast transfer can be demonstrated. The information about the instrument one obtains using Young's fringe method is compared for uncorrected, Cs-corrected, and Cc /Cs-corrected instruments. The experimental results agree well with simulations. The conclusions might be useful to others in understanding the process of image formation in a Cc /Cs-corrected transmission electron microscope.

Keywords

aberration correctorchromatic aberrationTEMinformation limittilted illuminationYoung's fringe method
Type
Special Section—Aberration-Corrected Electron Microscopy
Information
Microscopy and Microanalysis , Volume 16 , Issue 4 , August 2010 , pp. 393 - 408
Copyright
Copyright © Microscopy Society of America 2010

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References

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