Here we demonstrate sub- 1.5 Å resolution in compositionally sensitive high-angle annular dark-field (HAADF) (“Z-contrast”) imaging. For the first time this has been achieved on a 200 kV field-emission transmission electron microscope (FEGTEM), the JEOL JEM-2010F. With a Gatan imaging filter, this type of instrument is then capable of both analytical imaging and electron energy-loss spectroscopy at similar spatial resolution as in the 300 kV dedicated STEM.

The Z-contrast imaging technique has a spatial resolution given by the size of the electron probe. When used to image periodic specimens and their defects, the effective incoherent nature of the Z-contrast method leads to higher resolution for given lens Cs, higher sensitivity to atomic number and easier qualitative image interpretation than in HRTEM.In practice, the ability to form a small (atomic resolution) probe depends on the brightness of the electron source, and achieving low enough levels of mechanical and electrical instabilities that otherwise incoherently broaden the probe.