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Improving Signal-to-Noise Ratio in Scanning Transmission Electron Microscopy Energy-Dispersive X-Ray (STEM-EDX) Spectrum Images Using Single-Atomic-Column Cross-Correlation Averaging

Published online by Cambridge University Press:  28 March 2016

Jong Seok Jeong Open the ORCID record for Jong Seok Jeong [Opens in a new window]  and
K. Andre Mkhoyan
Jong Seok Jeong*
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, MN 55455, USA
K. Andre Mkhoyan*
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, MN 55455, USA
*
*Corresponding authors.[email protected] (KAM), [email protected] (JSJ)
*Corresponding authors.[email protected] (KAM), [email protected] (JSJ)
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Abstract

Acquiring an atomic-resolution compositional map of crystalline specimens has become routine practice, thus opening possibilities for extracting subatomic information from such maps. A key challenge for achieving subatomic precision is the improvement of signal-to-noise ratio (SNR) of compositional maps. Here, we report a simple and reliable solution for achieving high-SNR energy-dispersive X-ray (EDX) spectroscopy spectrum images for individual atomic columns. The method is based on standard cross-correlation aided by averaging of single-column EDX maps with modifications in the reference image. It produces EDX maps with minimal specimen drift, beam drift, and scan distortions. Step-by-step procedures to determine a self-consistent reference map with a discussion on the reliability, stability, and limitations of the method are presented here.

Keywords

STEM-EDXcross-correlationsubatomic precisionaveragingimage processing
Type
Technique and Instrumentation Development
Information
Microscopy and Microanalysis , Volume 22 , Issue 3 , June 2016 , pp. 536 - 543
Copyright
Copyright © Microscopy Society of America 2016

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