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Implementing Transmission Electron Backscatter Diffraction for Atom Probe Tomography

Published online by Cambridge University Press:  22 June 2016

Katherine P. Rice ,
Yimeng Chen ,
Ty J. Prosa  and
David J. Larson
Katherine P. Rice*
Affiliation:
CAMECA Instruments Inc., 5500 Nobel Dr., Madison, WI 53711, USA
Yimeng Chen
Affiliation:
CAMECA Instruments Inc., 5500 Nobel Dr., Madison, WI 53711, USA
Ty J. Prosa
Affiliation:
CAMECA Instruments Inc., 5500 Nobel Dr., Madison, WI 53711, USA
David J. Larson
Affiliation:
CAMECA Instruments Inc., 5500 Nobel Dr., Madison, WI 53711, USA
*
*Corresponding author. [email protected]
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Abstract

There are advantages to performing transmission electron backscattering diffraction (tEBSD) in conjunction with focused ion beam-based specimen preparation for atom probe tomography (APT). Although tEBSD allows users to identify the position and character of grain boundaries, which can then be combined with APT to provide full chemical and orientation characterization of grain boundaries, tEBSD can also provide imaging information that improves the APT specimen preparation process by insuring proper placement of the targeted grain boundary within an APT specimen. In this report we discuss sample tilt angles, ion beam milling energies, and other considerations to optimize Kikuchi diffraction pattern quality for the APT specimen geometry. Coordinated specimen preparation and analysis of a grain boundary in a Ni-based Inconel 600 alloy is used to illustrate the approach revealing a 50° misorientation and trace element segregation to the grain boundary.

Keywords

atom probe tomographytransmission EBSDTKDFIBgrain boundary analysis
Type
Technique and Instrumentation Development
Information
Microscopy and Microanalysis , Volume 22 , Issue 3 , June 2016 , pp. 583 - 588
Copyright
Copyright © Microscopy Society of America 2016

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