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High-Resolution Transmission Electron Microscopy Using Negative Spherical Aberration

Published online by Cambridge University Press:  17 March 2004

Chun-Lin Jia ,
Markus Lentzen,  and
Knut Urban
Chun-Lin Jia
Affiliation:
Institut für Festkörperforschung, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany
Markus Lentzen,
Affiliation:
Institut für Festkörperforschung, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany
Knut Urban
Affiliation:
Institut für Festkörperforschung, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany
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Abstract

A novel imaging mode for high-resolution transmission electron microscopy is described. It is based on the adjustment of a negative value of the spherical aberration CS of the objective lens of a transmission electron microscope equipped with a multipole aberration corrector system. Negative spherical aberration applied together with an overfocus yields high-resolution images with bright-atom contrast. Compared to all kinds of images taken in conventional transmission electron microscopes, where the then unavoidable positive spherical aberration is combined with an underfocus, the contrast is dramatically increased. This effect can only be understood on the basis of a full nonlinear imaging theory. Calculations show that the nonlinear contrast contributions diminish the image contrast relative to the linear image for a positive-CS setting whereas they reinforce the image contrast relative to the linear image for a negative-CS setting. The application of the new mode to the imaging of oxygen in SrTiO3 and YBa2Cu3O7 demonstrates the benefit to materials science investigations. It allows us to image directly, without further image processing, strongly scattering heavy-atom columns together with weakly scattering light-atom columns.

Keywords

aberration correctionspherical aberrationatomic resolution imagingcontrast theoryoxygen imagingdefects in electroceramics
Type
Quantitative Transmission Electron Microscopy at Jülich, Germany
Information
Microscopy and Microanalysis , Volume 10 , Issue 2 , April 2004 , pp. 174 - 184
Copyright
© 2004 Microscopy Society of America

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