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High-Performance Compact Pre-Lens Retarding Field Energy Analyzer for Energy Distribution Measurements of an Electron Gun

Published online by Cambridge University Press:  05 September 2022

Ha Rim Lee ,
Junhyeok Hwang ,
Takashi Ogawa Open the ORCID record for Takashi Ogawa [Opens in a new window] ,
Haewon Jung ,
Dal-Jae Yun ,
Sangsun Lee  and
In-Yong Park Open the ORCID record for In-Yong Park [Opens in a new window]
Ha Rim Lee
Affiliation:
Scientific Instruments Performance Evaluation Team, Advanced Instrumentation Institute, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea
Junhyeok Hwang
Affiliation:
Scientific Instruments Performance Evaluation Team, Advanced Instrumentation Institute, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea Major in Nanoconvergence Measurement, University of Science and Technology, 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea
Takashi Ogawa
Affiliation:
Scientific Instruments Performance Evaluation Team, Advanced Instrumentation Institute, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea Major in Nanoconvergence Measurement, University of Science and Technology, 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea
Haewon Jung
Affiliation:
Scientific Instruments Performance Evaluation Team, Advanced Instrumentation Institute, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea
Dal-Jae Yun
Affiliation:
Scientific Instruments Performance Evaluation Team, Advanced Instrumentation Institute, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea
Sangsun Lee
Affiliation:
Quantum Spin Team, Quantum Technology Institue, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea
In-Yong Park*
Affiliation:
Scientific Instruments Performance Evaluation Team, Advanced Instrumentation Institute, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea Major in Nanoconvergence Measurement, University of Science and Technology, 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea
*
*Corresponding author: In-Yong Park, E-mail: [email protected]
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Abstract

The energy distribution of an electron gun is one of the most important characteristics determining the performance of electron beam-based instruments, such as electron microscopes and electron energy loss spectroscopes. For accurate measurements of the energy distribution, this study presents a novel retarding field energy analyzer (RFEA) with the feature of an additional integrated pre-lens, which enables an adjustment of beam trajectory into the analyzer. The advantages of this analyzer are its compact size and simple electrode configuration. According to trajectory simulation theories, the optimum condition arises when the incident electron beam inside the RFEA is focused on the center of a retarding electrode. Comparing I–V curves depending on whether the pre-lens working or not, it is confirmed that the use of the pre-lens dramatically improves the energy resolution and efficiency of the signal acquisition process. The pre-lens RFEA was applied to characterize a Schottky electron gun under various temperatures and extraction voltages as operational conditions. When the tip temperature was increased by 50 K, we were able to measure an energy distribution broadening of 13.8 meV with the proposed pre-lens RFEA. The relative standard deviation of energy distribution was 0.7% for each working condition.

Keywords

cylinder lenselectron gunenergy distributionretarding field energy analyzer
Type
Software and Instrumentation
Information
Microscopy and Microanalysis , Volume 28 , Issue 6 , December 2022 , pp. 1989 - 1997
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Copyright
Copyright © The Author(s), 2022. Published by Cambridge University Press on behalf of the Microscopy Society of America

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