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Field Ion Microscopy of Multilayer Film Devices

Published online by Cambridge University Press:  02 July 2020

D. J. Larson ,
A. K. Petford-Long  and
A. Cerezo
D. J. Larson
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH
A. K. Petford-Long
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH
A. Cerezo
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH
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Extract

Control and optimization of materials’ properties will increasingly depend on the ability to tailor both the structure and chemical composition of the materials at the nanoscale level (100 nm and less). One specific class of “nanostructured” materials is the multilayer film (MLF) structure, which is formed by alternate deposition of two or more different elements or compounds and has a wide range of applications in, for example, the field of data recording and storage. In order to understand MLF structures well enough to improve and optimize their properties, characterization at the atomic level with regard to both structure and chemistry is essential. Interface quality is one of the most important parameters due to the possibility of intermixing between layers. It is thus desirable to obtain information about the interface morphology in these materials at the highest possible resolution.

Type
Imaging and Analysis at the Atomic Level: 30 Years of Atom Probe Field Ion Microscopy
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 112 - 113
Copyright
Copyright © Microscopy Society of America

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References

1. Petford-Long, A. K. et al., Ultramicroscopy 47 (1992) 367.CrossRefGoogle Scholar

2. Hasegawa, N. et al., App. Surf. Sci. 67 (1993) 407.CrossRefGoogle Scholar

3. Larson, D. J. et al., Ultramicroscopy, submitted (1998).Google Scholar

4. This research was sponsored by the United States National Science Foundation (DJL) and by the Royal Society (AKPL). The MLr device blanks were fabricated and supplied by Hewlett Packard as part of a collaborative project with the University of Oxford.Google Scholar