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FIB Prepared TEM Sample Lift-out Using MEMS Grippers

Published online by Cambridge University Press:  01 August 2004

Kimberly Tuck ,
Matthew Ellis ,
Aaron Geisberger ,
George Skidmore  and
Phil Foster
Kimberly Tuck
Affiliation:
Zyvex Corporation, Richardson, Texas
Matthew Ellis
Affiliation:
Zyvex Corporation, Richardson, Texas
Aaron Geisberger
Affiliation:
Zyvex Corporation, Richardson, Texas
George Skidmore
Affiliation:
Zyvex Corporation, Richardson, Texas
Phil Foster
Affiliation:
Zyvex Corporation, Richardson, Texas
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 1144 - 1145
Copyright
© 2004 Microscopy Society of America

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