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The FIB Lift-Out Specimen Preparation Technique for TEM Analyses and Beyond: SEM, AUGER, STEM, and SIMS Applications

Published online by Cambridge University Press:  02 July 2020

F.A. Stevie ,
C.B. Vartuli ,
R.H. Mills ,
R.B. Irwin ,
T.L. Shofner  and
L.A. Giannuzzi
F.A. Stevie
Affiliation:
Lucent Technologies, 9333 S. John Young Pkwy., Orlando, FL32819
C.B. Vartuli
Affiliation:
Lucent Technologies, 9333 S. John Young Pkwy., Orlando, FL32819
R.H. Mills
Affiliation:
Lucent Technologies, 9333 S. John Young Pkwy., Orlando, FL32819
R.B. Irwin
Affiliation:
Lucent Technologies, 9333 S. John Young Pkwy., Orlando, FL32819
T.L. Shofner
Affiliation:
Bartech, 9333 S. John Young Pkwy., Orlando, FL32819
L.A. Giannuzzi
Affiliation:
Mechanical, Materials, and Aerospace Engineering, University of Central Florida, Orlando, FL32826
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Extract

The use of focused ion beams (FIB) to prepare site specific specimens for transmission electron microscopy (TEM) and scanning electron microscopy (SEM) has been well documented. The 5 to 7 nm resolution on the latest FIB instruments has enhanced the ability to locate and expose features of interest. The use of the lift-out technique of FIB specimen preparation removes the need for prior thinning of the sample for TEM analysis and permits the study of materials that were difficult or impossible to do previously. Use of high current (10 nA) FIB instruments makes specimen preparation possible in less than one hour; automatic operation of FIB instruments will further reduce this time. After milling in the FIB, specimens are micromanipulated in air onto a 3 mm diameter TEM sample grid coated with carbon. The ability to analyze lift-out specimens using other analytical techniques that can take advantage of this site specific capability was previously suggested.

Type
Precision Specimen Preparation
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 888 - 889
Copyright
Copyright © Microscopy Society of America

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References

1.Stevie, F.A., et al., Surf, and Inter. Anal. 23 (1995) 61.CrossRefGoogle Scholar
2.Giannuzzi, L.A., et al., Microscopy and Microanalysis, Springer, New York (1997) 347.Google Scholar
3.Giannuzzi, L.A., et al., Microscopy Research & Technique 41 (1998) 285.3.0.CO;2-Q>CrossRefGoogle ScholarPubMed
4.Stevie, F.A., et al., Char. & Metrol. for ULSI, AIP New York (1998) 868.Google Scholar