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FIB and HRTEM Characterization of Surface Oxides on Polysilicon MEMS after Cyclic Loading

Published online by Cambridge University Press:  03 August 2008

A Avishai ,
H Kahn ,
R Ballarini  and
A Heuer
A Avishai
Affiliation:
Case Western Reserve University
H Kahn
Affiliation:
Case Western Reserve University
R Ballarini
Affiliation:
University of Minnesota
A Heuer
Affiliation:
Case Western Reserve University
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 1010 - 1011
Copyright
© 2008 Microscopy Society of America

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