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Factors Affecting Quantitative Analysis Error in ESEM-EDS

Published online by Cambridge University Press:  02 July 2020

R. A. Carlton ,
C. E. Lyman  and
J. E. Roberts
R. A. Carlton
Affiliation:
Research and Development, Aventis Pharmaceuticals, Collegeville, PA1942
C. E. Lyman
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, PA18015
J. E. Roberts
Affiliation:
Department of Chemistry, Lehigh University, Bethlehem, PA18015
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Extract

Standard Reference Material (SRM) 482 of the National Institute of Standards and Technology is a set of 6 gold/copper wires, ranging in concentration from 0 to 100% Cu in 20% steps, intended for calibration studies of electron beam microanalyzers. This is an appropriate standard to test the accuracy of energy dispersive x-ray spectrometry (EDS) in the Environmental Scanning Electron Microscope (ESEM). While the presence of the gas in the sample chamber gives the ESEM its unique capabilities, it also is the source of complications to x-ray spectrometry. The gas can spread the primary electron beam into a wide skirt of electrons with the consequent production of x-rays many micrometers from the target location of the beam.

The six wires (∼ 500 jam in diameter) were embedded and polished in one epoxy mount. The mount was carbon coated in one set of experiments. The coating was removed and the sample retested.

Type
Working with ESEM and Other Variable Pressure Systems
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 790 - 791
Copyright
Copyright © Microscopy Society of America

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References

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