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Environmental SEM Electron Damage Imaging of Self Assembled Monolayers with SIMS

Published online by Cambridge University Press:  02 July 2020

Scott Wight ,
Greg Gillen  and
Tonya Herne
Scott Wight
Affiliation:
Surface and Microanalysis Science Division, National Institute of Standards and Technology, Gaithersburg, MD
Greg Gillen
Affiliation:
Surface and Microanalysis Science Division, National Institute of Standards and Technology, Gaithersburg, MD
Tonya Herne
Affiliation:
Process Measurements Division, National Institute of Standards and Technology, Gaithersburg, MD, 20899
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Extract

The scattering of primary beam electrons has several implications for energy dispersive X-ray analysis on the environmental scanning electron microscope (ESEM). One of the most basic problems is determining the spatial distribution and fraction of primary beam electrons scattered under typical high pressure analysis conditions A method for studying the scattering of the primary electron beam in the ESEM has been demonstrated. The method involves the use of self-assembled alkanethiol monolayers (SAM) which are sensitive to damage by primary beam electrons. After irradiation, the electron damaged molecules can be exchanged out of the monolayer by immersion in a second alkanethiol solution. The spatial distribution of this second marker compound can then be imaged directly by static secondary ion mass spectrometry (SSIMS). Alternatively, only a single fluorinated thiol is used and the decrease in fluorine secondary ion signal is used to map the electron damage.

Type
Environmental SEM
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 1209 - 1210
Copyright
Copyright © Microscopy Society of America 1997

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References

1.Wight, S. et al., Scanning, 19(1997)2.Google Scholar
2.Gillen, G. et al., Appl Phys Lett 65:5(1994)534.10.1063/1.112289CrossRefGoogle Scholar
3. Certain commercial equipment, instruments, or materials are identified in this report to specify adequately the experimental procedure. Such identification does not imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the materials or equipment identified are necessarily the best available for the purpose.Google Scholar