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The Energy Spectra of Secondary Electrons

Published online by Cambridge University Press:  02 July 2020

David C Joy
Affiliation:
EM Facility, University of Tennessee, Knoxville, TN37996-0810
David Braski
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, TN37831-6064
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Extract

It has been estimated that more than 90% of all scanning electron microscope (SEM) images ever published have been obtained using secondary electrons (SE) which are defined as being those electrons emitted with energies between 0 and 50eV. The properties of these secondary electron are therefore of considerable interest and importance. However, although secondary electrons have been intensively studied since their discovery by Starke in 1901 the majority of the work has been aimed at determining the SE yield coefficient and its variation with energy for elements and compounds. The energy spectrum of secondary electrons has received far less attention although it is evident that the form of the spectrum must have an effect on the image contrast observed in the SEM because SE detectors are energy selective devices. The few studies that have been made have mostly concentrated on spectra obtained from clean samples observed under ultra-high vacuum conditions. This is understandable, because it is certain that the presence of a surface layer of contamination will change the SE spectrum to some degree or other, but it is unfortunate because all specimens in real SEMs are dirty and it is information about this situation that is required.

Type
Low Voltage Scanning Electron Microscopy and X-Ray Microanalysis
Copyright
Copyright © Microscopy Society of America

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References

References:

1.Chung, M S and Everhart, T E, J.Appl.Phys. 45,707709, (1974)CrossRefGoogle Scholar
2. Portions of this study were funded by the Semiconductor Research Corporation under contract 96-LJ- 413.001. Oak Ridge National Laboratory is operated by Lockheed Martin Energy Research Corporation for the U.S. Department of Energy under contract number DE-AC05-96OR22464.Google Scholar