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Electron Flux Controlled Switching Between Electron Beam Induced Etching and Deposition

Published online by Cambridge University Press:  31 July 2006

M Toth ,
R Knowles ,
G Hartigan  and
C Lobo
M Toth
Affiliation:
FEI Company
R Knowles
Affiliation:
FEI Company
G Hartigan
Affiliation:
FEI Company
C Lobo
Affiliation:
Australian National University
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 168 - 169
Copyright
© 2006 Microscopy Society of America

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