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EFTEM- and STEM-EDXS Spectral Imaging of "Hidden" Si-based Semiconductor Device Defects

Published online by Cambridge University Press:  03 August 2008

CT Schamp  and
BT Valdez
CT Schamp
Affiliation:
Cerium Labs
BT Valdez
Affiliation:
Cerium Labs
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 390 - 391
Copyright
© 2008 Microscopy Society of America

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