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Determination of Electron Optical Properties for Aperture Zoom Lenses Using an Artificial Neural Network Method

Published online by Cambridge University Press:  16 February 2016

Nimet Isik
Nimet Isik*
Affiliation:
Department of Science Education, Mehmet Akif Ersoy University, 15200 Burdur, Turkey
*
*Corresponding author. [email protected]
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Abstract

Multi-element electrostatic aperture lens systems are widely used to control electron or charged particle beams in many scientific instruments. By means of applied voltages, these lens systems can be operated for different purposes. In this context, numerous methods have been performed to calculate focal properties of these lenses. In this study, an artificial neural network (ANN) classification method is utilized to determine the focused/unfocused charged particle beam in the image point as a function of lens voltages for multi-element electrostatic aperture lenses. A data set for training and testing of ANN is taken from the SIMION 8.1 simulation program, which is a well known and proven accuracy program in charged particle optics. Mean squared error results of this study indicate that the ANN classification method provides notable performance characteristics for electrostatic aperture zoom lenses.

Keywords

electron opticselectrostatic lenszoom lensartificial neural networkoptimization
Type
Materials Applications
Information
Microscopy and Microanalysis , Volume 22 , Issue 2 , April 2016 , pp. 458 - 462
Copyright
© Microscopy Society of America 2016 

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