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Deep RIE and Cryo-Etching of Nanostructures in Silicon and Polymers

Published online by Cambridge University Press:  03 August 2008

G DeRose ,
M Shearn ,
D Henry ,
Y Chen  and
A Scherer
G DeRose
Affiliation:
California Institute of Technology
M Shearn
Affiliation:
California Institute of Technology
D Henry
Affiliation:
California Institute of Technology
Y Chen
Affiliation:
California Institute of Technology
A Scherer
Affiliation:
California Institute of Technology
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 432 - 433
Copyright
© 2008 Microscopy Society of America

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