Based on excellent energy resolution and single quantum detection sensitivity, cryodetectors are offering a variety of new, analytical solutions for the analysis of elementary surface compositions, especially for the analysis of light elements and very small sized structures. Cryodetectors operate typically at temperatures between 30 and 200mK and require vibration free and fully automated cooling systems in order to qualify for industrial applications. Cryodetectors are low temperature superconductors where the two most prominent types are based on microcalorimeter and tunnel diode principles. Cryodetectors are mainly employed for surface analysis applications as energy dispersive X-ray spectrometers with energy resolutions of less than 15eV, but may also be used as highly sensitive UV, VIS or even mass spectrometers in the future.

Conventional EDX detectors are semiconductors. An impinging X-ray quantum creates a number of electronhole pairs dependent on the energy of the triggering event thus allowing energy dispersive measurements. The performance limit of semiconductor detectors has almost been reached and is determined by the excitation energy necessary to create electron-hole pairs.