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Critical Dimension Monitoring with STEM in Thin Film Magnetic Head Wafer Production

Published online by Cambridge University Press:  03 August 2008

H Wang ,
J Fang  and
M Lederman
H Wang
Affiliation:
Western Digital Corporation
J Fang
Affiliation:
Western Digital Corporation
M Lederman
Affiliation:
Western Digital Corporation
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 1026 - 1027
Copyright
© 2008 Microscopy Society of America

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