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Conventional TEM Investigation Of The FIB Damage In Copper

Published online by Cambridge University Press:  07 September 2007

D Kiener
Affiliation:
Materials Center Leoben and Austrian Academy of Sciences, Austria
T Jörg
Affiliation:
Austrian Academy of Sciences, Austria
M Rester
Affiliation:
Austrian Academy of Sciences, Austria
C Motz
Affiliation:
Austrian Academy of Sciences, Austria
G Dehm
Affiliation:
Austrian Academy of Sciences and Montanuniversität Leoben, Austria
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Extract

Extended abstract of a paper presented at MC 2007, 33rd DGE Conference in Saarbrücken, Germany, September 2 – September 7, 2007

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2007

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