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Contamination Removal on FIB Nano-Patterned Surfaces

Published online by Cambridge University Press:  31 July 2006

K Dovidenko ,
LA Le Tarte  and
RA Potyrailo
K Dovidenko
Affiliation:
GE Global Research Center
LA Le Tarte
Affiliation:
GE Global Research Center
RA Potyrailo
Affiliation:
GE Global Research Center
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 206 - 207
Copyright
© 2006 Microscopy Society of America

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