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Computer Controlled High-Throughput Integration System: FasTEM

Published online by Cambridge University Press:  02 July 2020

K. Fukushima ,
R.M. O'Donnell ,
K. Fujiwara ,
H. Kai ,
E. Okunishi ,
M. Kawasaki ,
M. Kersker  and
M. Naruse
K. Fukushima
Affiliation:
JEOL Ltd., 1-2, Musashino 3-chome, Akishima, Tokyo, 196-8558, JAPAN
R.M. O'Donnell
Affiliation:
JEOL(USA) Inc., 11 Dearborn Road, Peabody, MA01960, USA
K. Fujiwara
Affiliation:
JEOL Ltd., 1-2, Musashino 3-chome, Akishima, Tokyo, 196-8558, JAPAN
H. Kai
Affiliation:
JEOL Ltd., 1-2, Musashino 3-chome, Akishima, Tokyo, 196-8558, JAPAN
E. Okunishi
Affiliation:
JEOL Ltd., 1-2, Musashino 3-chome, Akishima, Tokyo, 196-8558, JAPAN
M. Kawasaki
Affiliation:
JEOL Ltd., 1-2, Musashino 3-chome, Akishima, Tokyo, 196-8558, JAPAN
M. Kersker
Affiliation:
JEOL(USA) Inc., 11 Dearborn Road, Peabody, MA01960, USA
M. Naruse
Affiliation:
JEOL Ltd., 1-2, Musashino 3-chome, Akishima, Tokyo, 196-8558, JAPAN
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Extract

Introduction

For the nano-area analysis of materials, it is necessary to evaluate all data obtained by HRTEM, EDS, EELS, and/or Energy Filter. Up till now, each analytical/imaging instrument required its original computer control system. Thus, the total operational environment for the nano-area analysis was not convenient for us. Recent progress of computer technology provides the ability to build a high performance environment for seamless operation by Client/Server design.

We have developed computer controlled high-throughput integration system based on PC, called FasTEM system, having seamless integration function and real-time remote control function of all instruments related to nano-area analysis. The FasTEM system is composed of Windows NT based Server PC System that is connected to the target TEM via RS232C for integrated operation, and Client PC SYSTEM connected to the Server PC via TCP/IP for remote operation (Fig.l).

Seamless Integration Function

All user interfaces of the analytical/imaging instruments, such as HRTEM, STEM BF/DF, EDS, PEELS and GIF can be seamlessly integrated into the Server PC.

Type
Instrument Performance
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 1144 - 1145
Copyright
Copyright © Microscopy Society of America

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