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Comprehensive Comparison of Various Techniques for the Analysis of Elemental Distributions in Thin Films

Published online by Cambridge University Press:  12 September 2011

D. Abou-Ras ,
R. Caballero ,
C.-H. Fischer ,
C.A. Kaufmann ,
I. Lauermann ,
R. Mainz ,
H. Mönig ,
A. Schöpke ,
C. Stephan  and
C. Streeck
...Show all authors
D. Abou-Ras*
Affiliation:
Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
R. Caballero
Affiliation:
Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
C.-H. Fischer
Affiliation:
Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
C.A. Kaufmann
Affiliation:
Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
I. Lauermann
Affiliation:
Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
R. Mainz
Affiliation:
Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
H. Mönig
Affiliation:
Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
A. Schöpke
Affiliation:
Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
C. Stephan
Affiliation:
Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
C. Streeck
Affiliation:
Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
S. Schorr
Affiliation:
Free University Berlin, Department for Geosciences, Malteserstr. 74-100, 12249 Berlin, Germany
A. Eicke
Affiliation:
Zentrum für Sonnenenergie- und Wasserstoff-Forschung, Industriestr. 6, 70565 Stuttgart, Germany
M. Döbeli
Affiliation:
ETH Zurich, Laboratory of Ion Beam Physiscs, Schafmattstrasse 20, 8093 Zurich, Switzerland
B. Gade
Affiliation:
Thermo Fisher Scientific, Im Steingrund 4-6, 63303 Dreieich, Germany
J. Hinrichs
Affiliation:
Thermo Fisher Scientific, Hanna-Kunath Str. 11, 28199 Bremen, Germany
T. Nunney
Affiliation:
Thermo Fisher Scientific, The Birches, Imberhorne Lane, East Grinstead, West Sussex, RH19 1UB, UK
H. Dijkstra
Affiliation:
Thermo Fisher Scientific, Takkebijsters 1, 4817 Breda, The Netherlands
V. Hoffmann
Affiliation:
IFW Dresden, Helmholtzstraße 20, 01069 Dresden, Germany
D. Klemm
Affiliation:
IFW Dresden, Helmholtzstraße 20, 01069 Dresden, Germany
V. Efimova
Affiliation:
IFW Dresden, Helmholtzstraße 20, 01069 Dresden, Germany
A. Bergmaier
Affiliation:
Universität der Bundeswehr München, LRT2, Werner-Heisenberg-Weg 39, D-85577 Neubiberg, Germany
G. Dollinger
Affiliation:
Universität der Bundeswehr München, LRT2, Werner-Heisenberg-Weg 39, D-85577 Neubiberg, Germany
T. Wirth
Affiliation:
Federal Institute for Materials Research and Testing, Unter den Eichen 87, 12205 Berlin, Germany
W. Unger
Affiliation:
Federal Institute for Materials Research and Testing, Unter den Eichen 87, 12205 Berlin, Germany
A.A. Rockett
Affiliation:
Department of Materials Science & Engineering, University of Illinois, 1304 W. Green St., Urbana, IL 61801, USA
A. Perez-Rodriguez
Affiliation:
Catalonia Institute for Energy Research (IREC), C. Jardins de les Dones de Negre 1, 08930 Sant Adrià del Besòs (Barcelona), Spain IN2UB, Departament d'Electrònica, Universitat de Barcelona, C. Martí i Franquès 1, 08028 Barcelona, Spain
J. Alvarez-Garcia
Affiliation:
Centre de Recerca i Investigació de Catalunya (CRIC), Trav. de Gràcia 108, 08012 Barcelona, Spain
V. Izquierdo-Roca
Affiliation:
IN2UB, Departament d'Electrònica, Universitat de Barcelona, C. Martí i Franquès 1, 08028 Barcelona, Spain
T. Schmid
Affiliation:
ETH Zurich, Department of Chemistry and Applied Biosciences, 8093 Zurich, Switzerland
P.-P. Choi
Affiliation:
Max Planck Institute for Iron Research, Max-Planck-Str. 1, 40237 Düsseldorf, Germany
M. Müller
Affiliation:
Otto-von-Guericke-University Magdeburg, Institute of Experimental Physics, Universitätsplatz 2, 39106 Magdeburg, Germany
F. Bertram
Affiliation:
Otto-von-Guericke-University Magdeburg, Institute of Experimental Physics, Universitätsplatz 2, 39106 Magdeburg, Germany
J. Christen
Affiliation:
Otto-von-Guericke-University Magdeburg, Institute of Experimental Physics, Universitätsplatz 2, 39106 Magdeburg, Germany
H. Khatri
Affiliation:
Center for Photovoltaics Innovation and Commercialization (PVIC), University of Toledo, Toledo, OH 43606, USA
R.W. Collins
Affiliation:
Center for Photovoltaics Innovation and Commercialization (PVIC), University of Toledo, Toledo, OH 43606, USA
S. Marsillac
Affiliation:
Center for Photovoltaics Innovation and Commercialization (PVIC), University of Toledo, Toledo, OH 43606, USA
I. Kötschau
Affiliation:
centrotherm photovoltaics AG, Technology Thin Film, Johannes-Schmid-Str. 8, 89143 Blaubeuren, Germany
*
Corresponding author. E-mail: [email protected]
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Abstract

The present work shows results on elemental distribution analyses in Cu(In,Ga)Se2 thin films for solar cells performed by use of wavelength-dispersive and energy-dispersive X-ray spectrometry (EDX) in a scanning electron microscope, EDX in a transmission electron microscope, X-ray photoelectron, angle-dependent soft X-ray emission, secondary ion-mass (SIMS), time-of-flight SIMS, sputtered neutral mass, glow-discharge optical emission and glow-discharge mass, Auger electron, and Rutherford backscattering spectrometry, by use of scanning Auger electron microscopy, Raman depth profiling, and Raman mapping, as well as by use of elastic recoil detection analysis, grazing-incidence X-ray and electron backscatter diffraction, and grazing-incidence X-ray fluorescence analysis. The Cu(In,Ga)Se2 thin films used for the present comparison were produced during the same identical deposition run and exhibit thicknesses of about 2 μm. The analysis techniques were compared with respect to their spatial and depth resolutions, measuring speeds, availabilities, and detection limits.

Keywords

elemental distributionscomparisondepth profilingchemical mappingthin filmssolar cellschalcopyrite-typeCu(In,Ga)Se2
Type
Materials Applications
Information
Microscopy and Microanalysis , Volume 17 , Issue 5 , October 2011 , pp. 728 - 751
Copyright
Copyright © Microscopy Society of America 2011

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References

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