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Combinatorial RF Magnetron Sputtering for Rapid Materials Discovery: Methodology and Applications

Published online by Cambridge University Press:  01 August 2004

Philip D. Rack ,
Jason D. Fowlkes  and
Yuepeng Deng
Philip D. Rack
Affiliation:
University of Tennessee
Jason D. Fowlkes
Affiliation:
University of Tennessee
Yuepeng Deng
Affiliation:
University of Tennessee
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 58 - 59
Copyright
© 2004 Microscopy Society of America

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