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Bandgap Measurement of Dielectric Thin Films by Using Monochromated STEM-EELS

Published online by Cambridge University Press:  05 August 2007

J Park ,
S Heo ,
J Chung ,
H Kim  and
G-S Park
J Park
Affiliation:
Samsung Advanced Institute of Technology,Korea
S Heo
Affiliation:
Samsung Advanced Institute of Technology,Korea
J Chung
Affiliation:
Samsung Advanced Institute of Technology,Korea
H Kim
Affiliation:
Samsung Advanced Institute of Technology,Korea
G-S Park
Affiliation:
Samsung Advanced Institute of Technology,Korea
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 1306 - 1307
Copyright
© 2007 Microscopy Society of America

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