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Atomic-Scale Analytical Tomography†

Published online by Cambridge University Press:  23 February 2017

Thomas F. Kelly
Thomas F. Kelly*
Affiliation:
CAMECA Instruments, Inc., 5500 Nobel Drive, Madison, WI53711, USA
*
*Corresponding author. [email protected]
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Abstract

The concept of atomic-scale tomography has been proposed in the past decade as a technique that could deliver the position of all atoms with high precision and their elemental (isotopic) identity. The technique was never intended to be limited to merely structural information and there is clearly a rich array of additional analytical information that can be brought to bear on such tomographs. In this paper, some of these types of information are considered and the implications are explored. The fuller realm of this analytical and structural information may be called atomic-scale analytical tomography.

Keywords

atomic-scale tomographyatomic-scale analytical tomographyatom probe tomographyanalytical electron microscopy
Type
Instrumentation and Software
Information
Microscopy and Microanalysis , Volume 23 , Issue 1 , February 2017 , pp. 34 - 45
Copyright
© Microscopy Society of America 2017 

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Footnotes

†

This paper is an outgrowth of a talk presented at a Workshop on the Future Scientific Direction of Electron Microscopy held at Forschungszentrum Jülich on July 13–15, 2016.

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