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Arsenic Segregation to Dislocation Loops in Silicon

Published online by Cambridge University Press:  03 August 2008

DJ Larson ,
K Thompson ,
RL Alvis ,
DF Lawrence ,
RM Ulfig ,
DA Reinhard ,
PH Clifton ,
JH Bunton ,
DR Lenz  and
TF Kelly
DJ Larson
Affiliation:
Imago Scientific Instruments
K Thompson
Affiliation:
Imago Scientific Instruments
RL Alvis
Affiliation:
Imago Scientific Instruments
DF Lawrence
Affiliation:
Imago Scientific Instruments
RM Ulfig
Affiliation:
Imago Scientific Instruments
DA Reinhard
Affiliation:
Imago Scientific Instruments
PH Clifton
Affiliation:
Imago Scientific Instruments
JH Bunton
Affiliation:
Imago Scientific Instruments
DR Lenz
Affiliation:
Imago Scientific Instruments
TF Kelly
Affiliation:
Imago Scientific Instruments
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 324 - 325
Copyright
© 2008 Microscopy Society of America

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