Hostname: page-component-586b7cd67f-dsjbd Total loading time: 0 Render date: 2024-11-26T08:44:39.979Z Has data issue: false hasContentIssue false

An Introduction to Helium Ion Microscopy

Published online by Cambridge University Press:  31 July 2006

J Notte
Affiliation:
ALIS Corporation
R Hill
Affiliation:
ALIS Corporation
S McVey
Affiliation:
ALIS Corporation
L Farkas
Affiliation:
ALIS Corporation
R Percival
Affiliation:
ALIS Corporation
B Ward
Affiliation:
ALIS Corporation
Get access

Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Research Article
Copyright
© 2006 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)