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An Improved Visual Tracking Method in Scanning Electron Microscope

Published online by Cambridge University Press:  04 May 2012

Changhai Ru ,
Yong Zhang ,
Haibo Huang  and
Tao Chen
Changhai Ru*
Affiliation:
College of Automation, Harbin Engineering University, Harbin 150001, China Robotics and Microsystems Center, Soochow University, Jiangsu 215021, China
Yong Zhang
Affiliation:
Advanced Micro and Nanosystems Laboratory, University of Toronto, Ontario M5S3G8, Canada
Haibo Huang
Affiliation:
Robotics and Microsystems Center, Soochow University, Jiangsu 215021, China
Tao Chen
Affiliation:
Robotics and Microsystems Center, Soochow University, Jiangsu 215021, China
*
Corresponding author. E-mail: [email protected]
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Abstract

Since their invention, nanomanipulation systems in scanning electron microscopes (SEMs) have provided researchers with an increasing ability to interact with objects at the nanoscale. However, most nanomanipulators that are capable of generating nanometer displacement operate in an open-loop without suitable feedback mechanisms. In this article, a robust and effective tracking framework for visual servoing applications is presented inside an SEM to achieve more precise tracking manipulation and measurement. A subpixel template matching tracking algorithm based on contour models in the SEM has been developed to improve the tracking accuracy. A feed-forward controller is integrated into the control system to improve the response time. Experimental results demonstrate that a subpixel tracking accuracy is realized. Furthermore, the robustness against clutter can be achieved even in a challenging tracking environment.

Keywords

nanomanipulationvisual servoSEMsubpixel tracking
Type
Techniques Development
Information
Microscopy and Microanalysis , Volume 18 , Issue 3 , June 2012 , pp. 612 - 620
Copyright
Copyright © Microscopy Society of America 2012

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