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AFM and XPS Characterization of TiN Thin Films Grown on Nanoporous Al2O3 by using the DC Sputtering Technique Assisted by Balanced Magnetron
Published online by Cambridge University Press: 05 August 2007
Extract
Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007
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- Research Article
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- © 2007 Microscopy Society of America