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Ad Hoc Auto-Tuning of Aberrations Using High-Resolution STEM Images by Autocorrelation Function

Published online by Cambridge University Press:  31 July 2012

Hidetaka Sawada ,
Masashi Watanabe  and
Izuru Chiyo
Hidetaka Sawada*
Affiliation:
JEOL Ltd., EMBU, 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
Masashi Watanabe
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, PA 18015, USA
Izuru Chiyo
Affiliation:
JEOL Ltd., EMBU, 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
*
Corresponding author. E-mail: [email protected]
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Abstract

A method for measurement of the aberration status from high-resolution dark-field images is developed using scanning transmission electron microscopy (STEM), called the Segmented Image Autocorrelation function Matrix (SIAM). The method employs an autocorrelation function from the segmented area in the defocused STEM images from an aligned crystalline specimen to measure the defocus and twofold astigmatism for the probe-forming system. The values measured using this method can be fed directly back to the instrument by changing the strength of the stigmator and the objective lens of the microscope. It is successfully demonstrated that the feedback system can automatically correct the defocus and twofold astigmatism of the microscope after several iterations using practical STEM images from an actual crystalline specimen.

Keywords

high-resolution STEM imageautocorrelation functionaberrationauto-tuningcrystalline specimen
Type
Special Section: Aberration-Corrected Electron Microscopy
Information
Microscopy and Microanalysis , Volume 18 , Issue 4 , August 2012 , pp. 705 - 710
Copyright
Copyright © Microscopy Society of America 2012

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