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Accuracy and Precision f Quantitative X-Ray Microanalysis in the Environmental Scanning Electron Microscope (ESEM)

Published online by Cambridge University Press:  02 July 2020

Robert A. Carlton ,
Charles E. Lyman  and
James E. Roberts
Robert A. Carlton
Affiliation:
Elan Pharmaceuticals, King of Prussia, PA, 19406, USA
Charles E. Lyman
Affiliation:
Lehigh University, Dept. of Materials Science and Engineering, Bethlehem, PA, 18015, USA
James E. Roberts
Affiliation:
Lehigh University, Dept. of Chemistry, Bethlehem, PA, 18015, USA
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Abstract

This paper presents the results of studies concerning the accuracy and precision of x-ray microanalysis (EDS) in the environmental scanning electron microscope (ESEM). The ESEM is distinguished by its use-of gas in the microscope specimen chamber for imaging and for charge neutralization. Previous work on EDS-ESEM has concentrated either on qualitative x-ray microanalysis or on correction methods to the enlarged x-ray spatial resolution due to the electron skirt. Recent work shows that quantitative analysis is possible once charge neutralization can be accomplished in practice.

Accuracy and precision were evaluated in the work presented here using NIST SRM 482 (goldcopper alloys) and NIST SRM K411 (glass beads). The gold-copper alloy wires were prepared by mounting them in epoxy mounts and polishing to a metallurgical finish. The glass spheres were prepared by sprinkling a small amount of the sample onto double-sided carbon tape mounted onto an aluminum SEM stub.

Type
Quantitative X-Ray Microanalysis in the Microprobe, in the SEM and in The ESEM:Theory and Practice (Organized by R. Gauvin and E. Lifshin)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 676 - 677
Copyright
Copyright © Microscopy Society of America 2001

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