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3D Materials Characterization using Dual-Beam FIB/SEM Techniques

Published online by Cambridge University Press:  01 August 2004

E Lee ,
R Williams ,
G B Viswanathan ,
R Banerjee  and
H L Fraser
E Lee
Affiliation:
Ohio State University
R Williams
Affiliation:
Ohio State University
G B Viswanathan
Affiliation:
Ohio State University
R Banerjee
Affiliation:
Ohio State University
H L Fraser
Affiliation:
Ohio State University
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 1128 - 1129
Copyright
© 2004 Microscopy Society of America

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