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3D Energy-Dispersive X-ray Spectrometry (3D EDXS) in a DualBeam FIB: Aspects of Sample Preparation and Quantitative Analysis

Published online by Cambridge University Press:  03 August 2008

M Schaffer ,
H Schröttner  and
J Wagner
M Schaffer
Affiliation:
Graz University of Technology, Austria
H Schröttner
Affiliation:
Graz University of Technology, Austria
J Wagner
Affiliation:
Graz University of Technology, Austria
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 982 - 983
Copyright
© 2008 Microscopy Society of America

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