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3D Atom Probe Microscopy Sample Preparation by Using L-Shape FIB-SEM-Ar Triple Beam

Published online by Cambridge University Press:  27 August 2014

Xin Man ,
Tatsuya Asahata ,
Atsushi Uemoto ,
Hidekazu Susuki ,
Hiroyuki Suzuki ,
Masakatsu Hasuda  and
Toshiaki Fujii
Xin Man
Affiliation:
Beam Technology Engineering Department, Hitachi High-Tech Science Corporation, Oyama-cho, Sunto-gun, Shizuoka, Japan
Tatsuya Asahata
Affiliation:
Beam Technology Engineering Department, Hitachi High-Tech Science Corporation, Oyama-cho, Sunto-gun, Shizuoka, Japan
Atsushi Uemoto
Affiliation:
Beam Technology Engineering Department, Hitachi High-Tech Science Corporation, Oyama-cho, Sunto-gun, Shizuoka, Japan
Hidekazu Susuki
Affiliation:
Beam Technology Engineering Department, Hitachi High-Tech Science Corporation, Oyama-cho, Sunto-gun, Shizuoka, Japan
Hiroyuki Suzuki
Affiliation:
Beam Technology Engineering Department, Hitachi High-Tech Science Corporation, Oyama-cho, Sunto-gun, Shizuoka, Japan
Masakatsu Hasuda
Affiliation:
Beam Technology Engineering Department, Hitachi High-Tech Science Corporation, Oyama-cho, Sunto-gun, Shizuoka, Japan
Toshiaki Fujii
Affiliation:
Beam Technology Engineering Department, Hitachi High-Tech Science Corporation, Oyama-cho, Sunto-gun, Shizuoka, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 354 - 355
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Larson, D.J., et al, Ultramicroscopy 79 (1999). p.287.Google Scholar
[2] McKenzie, W.R., et al, Microscopy: Science, Technology, Application and Education Contents 3 (2010). p.1800.Google Scholar