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30 kV STEM-SEM – The Perfect Conditions for Transmission Spectroscopy?

Published online by Cambridge University Press:  30 July 2021

Sam Marks ,
Philippe Pinard ,
Sharhid Jabar ,
Geoff West ,
George Wetzel ,
Simon Burgess  and
Christian Lang
Sam Marks
Affiliation:
Oxford Instruments NanoAnalysis, High Wycombe, England, United Kingdom
Philippe Pinard
Affiliation:
Oxford Instruments NanoAnalysis, High Wycombe, United Kingdom
Sharhid Jabar
Affiliation:
Warwick Manufacturing Group, University of Warwick, United States
Geoff West
Affiliation:
Warwick Manufacturing Group, University of Warwick, United States
George Wetzel
Affiliation:
Clemson University, United States
Simon Burgess
Affiliation:
Oxford Instruments NanoAnalysis, High Wycombe, England, United Kingdom
Christian Lang
Affiliation:
Oxford Instruments Nanoanalysis, High Wycombe, England, United Kingdom

Abstract

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Type
Advances in Analytical STEM-in-SEM
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 1324 - 1326
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Burgess, S., Sagar, J., Holland, J., Li, X., & Bauer, F. (2017). Ultra-low kV EDS–a new approach to improved spatial resolution, surface sensitivity, and light element compositional imaging and analysis in the SEM. Microscopy Today, 25(2), 20-29.CrossRefGoogle Scholar
Ritchie, N. W. (2005). A new Monte Carlo application for complex sample geometries. Surface and Interface Analysis: An International Journal devoted to the development and application of techniques for the analysis of surfaces, interfaces and thin films, 37(11), 1006-1011.CrossRefGoogle Scholar
Sagar, J., Wood, D., Pinard, P., Howe, J., Holland, J., Burgess, S., & Statham, P. (2018). X-ray Spectrum Imaging at High Resolution in the STEM and STEM/SEM and SEM. Microscopy and Microanalysis, 24(S1), 656-657.CrossRefGoogle Scholar