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Nanostructured Gold Thin Films Prepared by Pulsed Laser Deposition

Published online by Cambridge University Press:  03 March 2011

Eric Irissou ,
Boris Le Drogoff ,
Mohammed Chaker ,
Michel Trudeau  and
Daniel Guay
Eric Irissou
Affiliation:
INRS-Énergie, Matériaux et Télécommunication, Varennes, Québec J3X 1S2, Canada
Boris Le Drogoff
Affiliation:
INRS-Énergie, Matériaux et Télécommunication, Varennes, Québec J3X 1S2, Canada
Mohammed Chaker
Affiliation:
INRS-Énergie, Matériaux et Télécommunication, Varennes, Québec J3X 1S2, Canada
Michel Trudeau
Affiliation:
Chimie et Matériaux, Institut de Recherche d’Hydro-Québec (IREQ), Varennes, Québec J3X 1S1, Canada
Daniel Guay*
Affiliation:
INRS-Énergie, Matériaux et Télécommunication, Varennes, Québec J3X 1S2, Canada
*
a)Address all correspondence to this author. e-mail: guay@inrs-emt.uquebec.ca
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Abstract

A structural and morphological study of nanostructured gold thin films prepared by pulsed laser deposition in the presence of several inert background gases (Ar, He, and N2) and at various pressures (from 10 mTorr to 1 Torr) and target-to-substrate distances (from 1 to 10 cm) is presented. Structural and morphological analyses were undertaken using semiquantitative x-ray diffraction, scanning tunneling microscopy, and transmission electron microscopy. For each set of deposition conditions, the kinetic energy of the neutral gold species [Au(I)] present in the plasma plume was determined by time-of-flight emission spectroscopy and used to characterize the plasma dynamics. It is shown that all films exhibit a transition from highly [111] oriented to polycrystalline as the Au(I) kinetic energy decreases. The polycrystalline phase ratio is close to 0% for Au(I) kinetic energy larger than approximately 3.0 eV/atom and approximately 86 ± 10% for Au(I) kinetic energy smaller than approximately 0.30 eV/atom, irrespective of the background gas atmosphere. The mean crystallite size of both phases and the mean roughness of the films also follow a unique relation with the Au(I) kinetic energy, independently of the nature of the background gas, and nanocrystalline films with crystallite size as small as 12 nm are obtained for Au(I) kinetic energy smaller than 0.3 eV/atom.

Keywords

Laser ablationNanoparticleMetal
Type
Articles
Information
Journal of Materials Research , Volume 19 , Issue 3 , March 2004 , pp. 950 - 958
Copyright
Copyright © Materials Research Society 2004

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