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Microstructural evolution and piezoelectric properties of thick Pb(Zr,Ti)O3 films deposited by the multi-sputtering method: Part II. Piezoelectric properties

Published online by Cambridge University Press:  18 July 2011

Chee-Sung Park ,
Jae-Wung Lee ,
Gun-Tae Park ,
Hyoun-Ee Kim  and
Jong-Jin Choi
Chee-Sung Park
Affiliation:
Department of Materials Science and Engineering, Seoul National University, Seoul 151-744, Korea
Jae-Wung Lee
Affiliation:
Department of Materials Science and Engineering, Seoul National University, Seoul 151-744, Korea
Gun-Tae Park
Affiliation:
Department of Materials Science and Engineering, Seoul National University, Seoul 151-744, Korea
Hyoun-Ee Kim*
Affiliation:
Department of Materials Science and Engineering, Seoul National University, Seoul 151-744, Korea
Jong-Jin Choi
Affiliation:
Department of Future Technology, Korea Institute of Machinery and Materials, Chang-Won, Gyeong-Nam 641-831, Korea
*
a) Address all correspondence to this author. e-mail: [email protected]
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Abstract

Highly dense and crack-free Pb(Zr,Ti)O3 (PZT) thick films with a controlled microstructure and orientation were deposited on a platinized silicon substrate by the radio frequency magnetron sputtering method using a single oxide target. The microstructure and orientation of the films were adjusted by applying a thin (100) PZT seed layer by the sol-gel method and subsequent repeated sputtering. When a thin layer was deposited on the seed layer, the film had small grains with a columnar structure. However, as the film became thicker, it developed a large and non-columnar grain structure. Therefore, reducing the thickness of the film per deposition allowed the columnar microstructure to be maintained. The (100) orientation of the film was able to be maintained by depositing it on a (100) oriented seed layer. PZT thick films with controlled orientations and microstructures were successfully deposited up to a thickness of about 5 μm, and their ferroelectric and piezoelectric properties were characterized.

Keywords

FilmMicrostructurePiezoelectric
Type
Articles
Information
Journal of Materials Research , Volume 22 , Issue 5 , May 2007 , pp. 1373 - 1377
Copyright
Copyright © Materials Research Society 2007

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References

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