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High-temperature stability of epitaxial, non-isostructural Mo/NbN superlattices

Published online by Cambridge University Press:  31 January 2011

C. Engström ,
A. Madan ,
J. Birch ,
M. Nastasi ,
L. Hultman  and
S. A. Barnett
C. Engström
Affiliation:
Advanced Coating Technology Group and Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois, and Physics Department, Linköping University, Sweden
A. Madan
Affiliation:
Advanced Coating Technology Group and Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois
J. Birch
Affiliation:
Physics Department, Linköping University, Sweden
M. Nastasi
Affiliation:
Los Alamos National Laboratory, Los Alamos, New Mexico
L. Hultman
Affiliation:
Physics Department, Linköping University, Sweden
S. A. Barnett
Affiliation:
Advanced Coating Technology Group and Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois
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Abstract

The effect of 1000 °C vacuum annealing on the structure and hardness of epitaxial Mo/NbN superlattice thin films was studied. The intensity of superlattice satellite peaks, measured by x-ray diffraction, decreased during annealing while new peaks corresponding to a MoNbN ternary phase appeared. The results are consistent with the Mo–Nb–N phase diagram, which shows no mutual solubility between Mo, NbN, and MoNbN. Even after 3-h anneals and a loss of most of the superlattice peak intensity, the room-temperature hardness was the same as for as-deposited superlattices. The retained hardness suggests that a residual nanocomposite structure is retained even after the formation of the ternary structure.

Type
Articles
Information
Journal of Materials Research , Volume 15 , Issue 2 , February 2000 , pp. 554 - 559
Copyright
Copyright © Materials Research Society 2000

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References

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