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Fabrication of Ga2O3/SnO2 core–shell nanowires and their ethanol gas sensing properties

Published online by Cambridge University Press:  01 August 2011

Yun-Guk Jang ,
Won-Sik Kim ,
Dai-Hong Kim  and
Seong-Hyeon Hong
Yun-Guk Jang
Affiliation:
Department of Materials Science and Engineering and Research Institute of Advanced Materials, Seoul National University, Seoul 151-744, Republic of Korea
Won-Sik Kim
Affiliation:
Department of Materials Science and Engineering and Research Institute of Advanced Materials, Seoul National University, Seoul 151-744, Republic of Korea
Dai-Hong Kim
Affiliation:
Department of Materials Science and Engineering and Research Institute of Advanced Materials, Seoul National University, Seoul 151-744, Republic of Korea
Seong-Hyeon Hong*
Affiliation:
Department of Materials Science and Engineering and Research Institute of Advanced Materials, Seoul National University, Seoul 151-744, Republic of Korea
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Ga2O3/SnO2 core–shell nanowires were synthesized by combining thermal evaporation and atomic layer deposition (ALD), and nanowire network sensors were fabricated by directly depositing them on the substrate with interdigitated Pt electrodes. Crystalline Ga2O3 nanowires of ∼20 nm diameter were grown on Au-catalyzed substrate at 800 °C. ALD-grown SnO2 shell layer was composed of interconnected nanoparticles of <10 nm, and its thickness was varied depending on the number of ALD cycles. The core–shell nanowire sensors exhibited the highest ethanol gas response at 400 °C, which was ∼200 °C lower than that for Ga2O3 nanowire sensor. The 100 cycle SnO2-coated nanowire sensor whose shell thickness was close to the Debye length of SnO2 had higher ethanol gas response in all the temperatures investigated. In addition, the core–shell nanowire sensors showed an order of magnitude higher gas response toward ethanol against other gases, such as H2, CO, and NH3.

Keywords

Atomic layer depositionNanostructureSensor
Type
Articles
Information
Journal of Materials Research , Volume 26 , Issue 17: Focus Issue: Nanowires: Fundamentals and Applications , 14 September 2011 , pp. 2322 - 2327
Copyright
Copyright © Materials Research Society 2011

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