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Effect of residual stress on the fracture strength of columnar TiN films

Published online by Cambridge University Press:  31 January 2011

S.J. Suresha ,
R. Gunda ,
V. Jayaram  and
S.K. Biswas
S.J. Suresha
Affiliation:
Materials Research Centre, Indian Institute of Science, Bangalore-560012, India
R. Gunda
Affiliation:
Department of Mechanical Engineering, Indian Institute of Science, Bangalore-560012, India
V. Jayaram*
Affiliation:
Materials Research Centre and Department of Materials Engineering, Indian Institute of Science, Bangalore-560012, India
S.K. Biswas
Affiliation:
Materials Research Centre and Department of Mechanical Engineering, Indian Institute of Science, Bangalore-560012, India
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

The intercolumnar fracture strength of a columnar TiN film was deconvoluted by nanoindentation load-displacement curves. The columnar boundary strength of such films strongly depends on the amount of residual stress present in the film. The residual stress of the coating was modified by plastically stretching the substrate. Indentation studies on the columnar TiN coating as a function of residual stress reveals that the column sliding stress diminishes with residual stress, suggesting that the presence of a high compressive stress substantially improves the fracture strength of a columnar TiN film. True film hardness on the other hand does not change.

Keywords

Thin filmFractureHardness
Type
Articles
Information
Journal of Materials Research , Volume 22 , Issue 12 , December 2007 , pp. 3501 - 3506
Copyright
Copyright © Materials Research Society 2007

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