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Structural properties and thermal stability of Fe/Al2O3 multilayers

Published online by Cambridge University Press:  03 March 2011

O. Lenoble ,
J.F. Bobo ,
H. Fischer ,
Ph. Bauer ,
M.F. Ravet  and
M. Piecuch
O. Lenoble*
Affiliation:
Laboratoire de Métallurgie Physique et Science des Matériaux. URA CNRS 155, Université Henri Poincaré, BP 239, 54506 Vanæuvre-lès-Nancy Cedex, France
J.F. Bobo
Affiliation:
Laboratoire de Métallurgie Physique et Science des Matériaux. URA CNRS 155, Université Henri Poincaré, BP 239, 54506 Vanæuvre-lès-Nancy Cedex, France
H. Fischer
Affiliation:
Laboratoire de Métallurgie Physique et Science des Matériaux. URA CNRS 155, Université Henri Poincaré, BP 239, 54506 Vanæuvre-lès-Nancy Cedex, France
Ph. Bauer
Affiliation:
Laboratoire de Métallurgie Physique et Science des Matériaux. URA CNRS 155, Université Henri Poincaré, BP 239, 54506 Vanæuvre-lès-Nancy Cedex, France
M.F. Ravet
Affiliation:
Laboratoire de Métallurgie Physique et Science des Matériaux. URA CNRS 155, Université Henri Poincaré, BP 239, 54506 Vanæuvre-lès-Nancy Cedex, France
M. Piecuch
Affiliation:
Laboratoire de Métallurgie Physique et Science des Matériaux. URA CNRS 155, Université Henri Poincaré, BP 239, 54506 Vanæuvre-lès-Nancy Cedex, France
*
a)Address all correspondence to this author.
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Abstract

Iron/alumina multilayers have been deposited on sapphire wafers using RF magnetron sputtering. To study the interdiffusion, the multilayers were annealed in a tubular furnace under a 10−7 mbar vacuum, and the samples examined by using a combination of classical diffractometry (θ/2θ) and Grazing Incidence Scattering (GIS) for the phase determination, and Small Angle X-ray Scattering (SAXS) for the superstructure of the multilayers. In all cases, in the as-deposited state the alumina is amorphous and the iron is crystalline in the bcc phase. Thermal anneals at temperatures between 573 and 873 K give evidence for segregation to the interfaces. At higher temperatures, interdiffusion occurs, leading to the formation of different phases. The Fe-Al2O3 interdiffusion coefficient has been evaluated in the temperature range from 873 to 1273 K.

Type
Articles
Information
Journal of Materials Research , Volume 10 , Issue 12 , December 1995 , pp. 3062 - 3067
Copyright
Copyright © Materials Research Society 1995

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References

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