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Microstructure and mechanical properties of chromium oxide coatings

Published online by Cambridge University Press:  31 January 2011

Xiaolu Pang ,
Kewei Gao  and
Alex A. Volinsky
Xiaolu Pang
Affiliation:
Department of Materials Physics and Chemistry, University of Science and Technology Beijing, Beijing 100083, China; and Department of Mechanical Engineering, University of South Florida, Tampa, Florida 33620
Kewei Gao*
Affiliation:
Department of Materials Physics and Chemistry, University of Science and Technology Beijing, Beijing 100083, China
Alex A. Volinsky
Affiliation:
Department of Mechanical Engineering, University of South Florida, Tampa, Florida 33620
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Chromium oxide coatings were deposited on low-carbon steel by radiofrequency reactive magnetron sputtering at different oxygen flux values. X-ray diffraction, x-ray photoelectron spectroscopy, and high-resolution transmission electron microscopy were used to investigate the microstructure of chromium oxide coatings. Varying oxygen flux changed the coating microstructure; as with increasing oxygen flux the chromium oxide coating undergoes amorphous-to-crystalline transformation. The coating developed strong (300) texture at higher oxygen flux. Hardness, elastic modulus, wear resistance, and adhesion were investigated by nanoindentation and pin-on-disk tests. With changes in the coating microstructure as a function of increased oxygen flux, hardness, elastic modulus, and wear resistance were improved, but its adhesion was weakened.

Keywords

AdhesionMicrostructureTransmission electron microscopy (TEM)
Type
Articles
Information
Journal of Materials Research , Volume 22 , Issue 12 , December 2007 , pp. 3531 - 3537
Copyright
Copyright © Materials Research Society 2007

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References

REFERENCES

1Lai, F.D., Huang, C.Y., Chang, C.M., Wang, L.A.Cheng, W.C.: Ultra-thin Cr2O3 well-crystallized films for high transmittance APSM in ArF line. Microelectron. Eng. 67/68, 17 2003CrossRefGoogle Scholar
2Sourty, E., Sullivan, J.L.Bijker, M.D.: Chromium oxide coatings applied to magnetic tape heads for improved wear resistance. Tribol. Int. 36, 389 2003CrossRefGoogle Scholar
3Hones, P., Diserens, M.Levy, F.: Characterization of sputter-deposited chromium oxide thin films. Surf. Coat. Technol. 120/121, 277 1999CrossRefGoogle Scholar
4Rothhaar, U.Oechsner, H.: Temperature induced dissolution of Cr2O3 into polycrystalline tantalum. Thin Solid Films 302, 266 1997CrossRefGoogle Scholar
5Bhushan, B., Theumissen, M.A.S.G.Li, X.: Tribological studies of chromium oxide films for magnetic recording applications. Thin Solid Films 311, 67 1997CrossRefGoogle Scholar
6Yashar, P., Rechner, J., Wong, M.S., Sproul, W.D.Barnett, S.A.: High-rate reactive sputtering of yttria-stabilized zirconia using pulsed d.c. power. Surf. Coat. Technol. 94/95, 333 1997CrossRefGoogle Scholar
7Olivas, J.D., Mireles, C., Acosta, E.Barrera, E.V.: Surface characterization of plasma spray metal deposition procedures using x-ray photoelectron spectroscopy. Thin Solid Films 299, 143 1997CrossRefGoogle Scholar
8Ozdemir, I., Tekmen, C., Okumus, S.C.Celik, E.: Thermal behaviour of plasma-sprayed Mo coating on cast-iron substrate. Surf. Coat. Technol. 174/175, 1064 2003CrossRefGoogle Scholar
9Forn, A., Picas, J.A.Simon, M.J.: Mechanical and tribological properties of Al–Si–Mo plasma-sprayed coatings. J. Mater. Process. Technol. 143/144, 52 2003CrossRefGoogle Scholar
10Kao, S.A., Doerner, F.M.Novotny, J.V.: Processing effects on the tribological characteristics of reactively sputtered chromium oxide (Cr2O3) overcoat films. J. Appl. Phys. 66, 5315 1989CrossRefGoogle Scholar
11Contoux, G., Cosset, F., Celerier, A.Machet, J.: Deposition process study of chromium oxide thin films obtained by d.c. magnetron sputtering. Thin Solid Films 292, 75 1997CrossRefGoogle Scholar
12Bhushan, B.: Development of r.f. sputtered chromium oxide coating for wear application. Thin Solid Films 64, 231 1979CrossRefGoogle Scholar
13Andrade, E., Flores, M., Muhl, S., Barradas, N.P., Murillo, G., Zavala, E.P.Rocha, M.F.: Ion beam analysis of TiN/Ti multilayers deposited by magnetron sputtering. Nucl. Instrum. Methods Phys. Res., Sect. B 219/220, 763 2004CrossRefGoogle Scholar
14Creus, J., Mazille, H.Idrissi, H.: Porosity evaluation of protective coatings onto steel, through electrochemical techniques. Surf. Coat. Technol. 130, 224 2000CrossRefGoogle Scholar
15Liu, C., Leyland, A., Bi, Q.Matthews, A.: Corrosion resistance of multi-layered plasma-assisted physical vapour deposition TiN and CrN coatings. Surf. Coat. Technol. 141, 164 2001CrossRefGoogle Scholar
16Fenker, M., Balzer, M., Jehn, H.A., Kappl, H., Lee, J.J., Lee, K-H.Lee, H-S.: Improvement of the corrosion resistance of hard wear resistant coatings by intermediate plasma etching or multilayered structure. Surf. Coat. Technol. 150, 101 2002CrossRefGoogle Scholar
17Bouzakis, K.D., Hadjiyiannis, S., Skordaris, G., Mirisidis, I., Michailidis, N.Erkens, G.: Wear development on cemented carbide inserts, coated with variable film thickness in the cutting wedge region. Surf. Coat. Technol. 188/189, 636 2004CrossRefGoogle Scholar
18Sarkar, A.D.: Friction and Wear Academic Press New York 1940 3Google Scholar
19Wagner, C.D., Riggs, W.M., Davis, L.E.Moulder, J.F.: Handbook of X-ray Photoelectron Spectroscopy, Perkin-Elmer Pittsburgh, PA 1979 73Google Scholar
20 PDF Card No. 06-0694, PCPDFWIN, Version 2.02, JCPDS-ICDD, 1999Google Scholar
21Murakami, M.Vook, R.: Strain-relaxation mechanisms of thin deposited films. Crit. Rev. Solid State Mater. Sci. 11, 317 1983CrossRefGoogle Scholar
22Johnson, K.L.: Contact Mechanics Cambridge Press Cambridge, UK 1985 153CrossRefGoogle Scholar
23Pang, X., Gao, K., Yang, H., Qiao, L., Wang, Y.Volinsky, A.A.: Interfacial microstructure of chromium oxide coatings. Adv. Eng. Mater. 9, 594 2007CrossRefGoogle Scholar
24Leyland, A.Matthews, A.: Thick Ti/TiN multilayered coatings for abrasive and erosive wear resistance. Surf. Coat. Technol. 70, 19 1994CrossRefGoogle Scholar
25Kim, G.S., Lee, S.Y., Hahn, J.H., Lee, B.Y., Han, J.G., Lee, J.H.Lee, S.Y.: Effects of the thickness of Ti buffer layer on the mechanical properties of TiN coatings. Surf. Coat. Technol. 171, 83 2003CrossRefGoogle Scholar
26Pang, X., Gao, K.Volinsky, A.A.: Annealing effects on microstructure and mechanical properties of chromium oxide coatings. Thin Solid Films doi: 10.1016/j.tsf.2007.08.083 2007Google Scholar
27Choi, H., Choi, S., Anderson, O.Bange, K.: Influence of film density on residual stress and resistivity for Cu thin films deposited by bias sputtering. Thin Solid Films 358, 202 1999CrossRefGoogle Scholar
28Mohan Rao, G.Mohan, S.: Studies on glow-discharge characteristics during dc reactive magnetron sputtering. J. Appl. Phys. 69, 6652 1991Google Scholar
29Volinsky, A.A., Moody, N.R.Gerberich, W.W.: Interfacial toughness measurements for thin films on substrates. Acta Mater. 50, 441 2002CrossRefGoogle Scholar
30Volinsky, A.A., Vella, J.B.Gerberich, W.W.: Fracture toughness, adhesion and mechanical properties of low-K dielectric thin films measured by nanoindentation. Thin Solid Films 429, 201 2002CrossRefGoogle Scholar
31Li, X.D., Diao, D.F.Bhushan, B.: Fracture mechanisms of amorphous carbon films in nanoindentation. Acta Mater. 45, 4453 1997CrossRefGoogle Scholar
32Bhushan, B.Li, X.D.: Nanomechanical characterization of solid surfaces and thin films. Int. Mater. Rev. 48, 125 2003CrossRefGoogle Scholar